https://doi.org/10.1590/0104-1428.210043
Polímeros: Ciência e Tecnologia, vol.31, e2021035, 2021, Publication date January 21, 2022 Structural and optical properties o plasma-deposited a-C:H:Si:O:N films plasma enhanced chemical vapor deposition, optical band gap, urbach energy Original Article
Polímeros: Ciência e Tecnologia, vol.31, e2021035, 2021, Publication date January 21, 2022 Structural and optical properties o plasma-deposited a-C:H:Si:O:N films plasma enhanced chemical vapor deposition, optical band gap, urbach energy Original Article